Home · Technology · ONTO

Onto Innovation Executive Compensation

ONTO · Technology · FY2025 Data

Onto Innovation is a publicly traded company in the Technology sector.

Total Exec Pay FY2025
$24.2M
Highest Paid Executive
$7.8M
Executives Tracked
8
💰 How does your salary compare?
See how you rank against the world's top executives — free, instant, SEC-backed data
Try it →
Data available:FY2025FY2024FY2023

Named Executive Officers — FY2025

ExecutiveYearBaseStockTotal Pay
Michael P. Plisinski
Executive Officer
FY2025$762,461$6.4M$7.8M
Ido Dolev
Executive Vice President Product Solutions Group
FY2025$457,296$3.3M$4.3M
Brian K. Roberts
Chief Financial Officer
FY2025$272,596$2.2M$3.1M
Mark R. Slicer
Executive Officer
FY2025$225,813$814,519$2.9M
Shirley Chen
Executive Officer
FY2025$224,192$1.4M$1.8M
Ramil Yaldaei
Executive Officer
FY2025$387,783$1.0M$1.7M
Yoon Ah E. Oh
Executive Officer
FY2024$406,587$835,998$1.5M
Srinivas Vedula
Executive Officer
FY2024$319,141$518,907$1.1M

Compensation Analysis

Computed directly from SEC-sourced figures tracked on this page — not a general description.

Onto Innovation discloses FY2025 compensation for 8 named executive officers, totaling $24.2M. Michael P. Plisinski, the Executive Officer, accounts for 32% of that combined total.

Michael P. Plisinski's total compensation rose 12% year-over-year, from $7.0M in FY2024 to $7.8M in FY2025.

Cash compensation (salary plus bonus) made up 15% of Onto Innovation's FY2025 tracked executive pay, with stock awards accounting for 68%. That's notably more stock-weighted than the typical Technology company in this dataset, where stock awards average 13% of tracked pay.

Among 134 other Technology companies in this dataset, Onto Innovation's combined tracked executive pay of $24.2M ranks in the 66th percentile (industry median: $17.5M). Its highest-paid executive, Michael P. Plisinski, ranks in the 40th percentile for top-executive pay in the sector (industry median: $10.4M).

Historical Compensation Data

ExecutiveYearBaseStockTotal
FY2025$762,461$6.4M$7.8M
FY2025$457,296$3.3M$4.3M
FY2025$272,596$2.2M$3.1M
FY2025$225,813$814,519$2.9M
FY2025$224,192$1.4M$1.8M
FY2025$387,783$1.0M$1.7M
FY2024$729,615$5.3M$7.0M
FY2024$463,500$922,402$1.7M
FY2024$406,587$835,998$1.5M
FY2024$362,977$749,649$1.4M
FY2024$319,141$518,907$1.1M
FY2024$310,195$500,972$984,859
FY2023$692,718$4.3M$5.6M
FY2023$370,067$1.1M$1.6M
FY2023$461,942$834,971$1.5M
FY2023$310,195$500,972$984,859
FY2023$310,961$475,049$956,011
Data Source: Compensation figures are sourced from Onto Innovation's DEF 14A proxy statement filed with the U.S. Securities and Exchange Commission (SEC) via EDGAR. Figures reflect the most recently available fiscal year per executive. See something wrong? Report it.
ExecSalaries.com · Data sourced from SEC EDGAR DEF 14A proxy filings. · Home · About · Corrections Policy · Privacy Policy